Perfect microscopic illumination system — Kohler illumination, provides bright and uniform illumination throughout the viewing field. Coordinated with infinity optical system NIS45, high NA and LWD objective, perfect microscopic imaging can be provided.
NIS45 series objectives
By adopting multilayer coating technology, NIS45 series objective lens can compensate spherical aberration and the chromatic aberration from ultraviolet to near infrared. The sharpness, resolution and color rendition of the images can be guaranteed . The image with high-resolution and flat image for various magnifications can be got.
“Near Operator” Design
The operating panel of the microscope is located on the front of the microscope.
The control mechanism used for observation is located on the front of the microscope (near the operator), which makes the operation on the microscope more quickly and conveniently when observing the sample. And it can reduce the fatigue caused by long time observation and the floating dust brought by a big range of movement.
Ergo tilting trinocular viewing head
The Ergo tilting viewing head can make the micro observation work more comfortable, so as to minimize the muscle tension and discomfort caused by long hours of work.
Focusing mechanism and fine adjustment handle of stage with low hand position
The focusing mechanism and fine adjustment handle of stage adopt the low hand position design, which conforms to the ergonomic design, and gives the greatest degree of comfortable feeling.
More convenient for industrial sample observation
The built-in clutch handle of stage
It can realize the fast and slow moving mode of the stage and can quickly locate large-area samples. It will no longer be difficult to locate the samples accurately and quickly when co-using with the fine adjustment handle of stage.
Built-in control panel
The specific button is set to correspond with a specific objective, and then the magnification can be changed easily by one click.
More suitable for FPD and LSI sample
The areas of microelectronics and semiconductor samples tend to be large, so ordinary metallographic microscope stage cannot meet their observation needs. HEX10 has a oversized stage with a large movement range, and it is convenient and easy to move. So it is an ideal tool for microscopic observation of large area industrial samples.
Anti-static protective cover
Industrial samples should be far away of floating dust, and a bit of dust can affect product quality and test results. HEX10 has a large area of anti – static protective cover, which can furthest prevent from the floating dust and fall dust so as to protect the samples and make the test result more accurate.
Longer working distance and high NA objective
All kinds of electronic components and semiconductors make the circuit board samples have a larger difference in height. Therefore, special objective with long working distance are adopted in this microscope. Meanwhile, in order to satisfy the industrial samples’ high requirements on color reproduction, the multilayer coating technology has been developed and improved over the years and the apochromatic objective with high NA are adopted, which can restore the real color of samples
ICOE research-grade microscopes can realize a variety of observation methods through modular combinatioin: brightfiled, darkfield, phase contrast, fluorescence, polarization, DIC and so on.
A variety of observation methods can meet various testing requirements.
1. Reflected illumination bright field
HEX10 adopts an excellent NIS infinity optical system. The viewing field is uniform, bright and with high color reproduction degree. IIt is suitable
to observe opaque semiconductors samples.
2. Dark field
It can realize bright observation at dark field observation and carry on high sensitivity inspection to the flaws such as fine scratches. It is suitable for surface inspection of samples with high demands.
3. Bright field of transmitted illumination
For transparent samples, such as FPD and optical elements, the bright field observation can be realized by condenser of transmitted light. It can also be used with DIC, simple polarization and other accessories.
4. Simple polarization
This observation method is suitable for birefringence specimens such as metallurgical tissues, minerals, LCD and semiconductor materials.
5. Reflected illumination DIC
Used to observe small differences in precision molds. This observation technology can express the subtle height differences that cannot be seen in ordinary observation in the form of relief and three-dimensional images.
NOMIS Basic image processing system
The software has various functions to satisfy your different image processing and analuysis needs.
Multiple camera are available to provide excellent microscopic photographing scheme.
The universal USB3.0 interface provides high-speed image transmission.
Image software with high quality image acquisition, processing and analysis
NOMIS Basic can quickly assemble small images into a large, high-resolution image by collecting image or importing images in real time.
Typical observation and quality control require interactive measurement function. For example: distance, angle, retangle , circle and ellipse.
HD Real-time HDR image video
When different samples are observed, the surface of the sample shows a high-contrast area. HDR enables users to create a perfect exposure image between clicks.
Depth of filed fusion/3D reconstruction
NOMIS Basic provides depth of field fusion and 3D reconstruction functions.
Sextuple nosepiece for bright and dark field, with DIC slot (Auto)
Plan Semi- Apochromatic 5x, 10x, 20x, 50x, 100x objectives (Apochromatic objectives are optional)
Large Stage 14” x 12”, Range: 356 x 305 mm, (Lighting area for transmitted light:356 x 284 mm), It can be used for 300mm wafers,attached is the sample bracket.
Transmitted illuminatin with condenser
Bright field ,dark field ,DIC, simplified polarized, and fluorescent
Bright field, simplified polarized light
6MP pixel high resolution camera USB3.0, with image processing software
Trinocular viewing head supplied, interpupillary distance between 47-78 mm and photo tube with standard Ø 23.2 mm tube. The trinocular tube with standard Ø 23.2 mm tube. The trinocular tilting head has an optical path selector (100:0 / 80:20 / 0:100). Diopter ± 5 adjustments on both eyepieces
Ergonomic 0 to 35° tilting trinocular head, interpupillary distance between 47-78 mm and photo tube with standard Ø 23.2 mm tube. The
trinocular tilting head has an optical path selector (100:0 / 80:20 / 0:100). Diopter ± 5 adjustments on both eyepieces
HEX10 Main body
Super wide field SWF 10x/25 mm eyepiece for Ø 30 mm tube
Super wide field SWF 10x/25 mm eyepiece with crosshairs for Ø 30 mm tube
Super wide field SWF 10x/25 mm eyepiece with 10/100 micrometer for Ø 30 mm tube
Super wide field SWF 10x/25 mm eyepiece with 10/100 micrometer and crosshairs for Ø 30 mm tube
Super wide field SWF 10x/25 mm eyepiece with 20 x 20 square grid reticle. For Ø 30 mm tube
Super wide field SWF 10x/22 mm eyepiece for Ø 30 mm tube
Super wide field SWF 10x/22 mm eyepiece with crosshairs for Ø 30 mm tube
Super wide field SWF 10x/22 mm eyepiece with micrometer for Ø 30 mm tube
Super wide field SWF 10x/22 mm eyepiece with micrometer and crosshairs for Ø 30 mm tube
Super wide field SWF 10x/22 mm eyepiece with 20 x 20 square grid reticle. For Ø 30 mm tube
Wide field WF 12.5x/17.5 mm eyepiece for Ø 30 mm tube
Wide field WF 15x/16 mm eyepiece for Ø 30 mm tube
Wide field WF 20x/12 mm eyepiece for Ø 30 mm tube
Eyeshade for eyepieces
SZA10 six apertures electric reversed nosepiece with compensator slide slot/reflected DIC slide slot
N-ANH Compensator slider
N-QWP 1/4 λPlate
N-CWE Quartz Wedge
N-AN Transmitted Analyzer (used with nosepiece)
DICR reflected DIC slide for materials sciences, With the redesign of the DIC-module visualization of height differences which normally cannot be displayed using brightfield techniques has greatly improved. These relief like images are ideal for surface inspections of wafers, LCD screens etc
Infinite Plan 2x/0.06 materials sciences objective, WD: 7.5mm, no cover glass correction, for bright field and dark field
Infinite Plan 5x/0.15 materials sciences objective, WD: 20mm, no cover glass correction, for bright field and dark field
Infinite Plan 10x/0.30 materials sciences objective, WD: 11mm, no cover glass correction, for bright field and dark field
Infinite Plan 20x/0.45 materials sciences objective, WD: 3.1mm, no cover glass correction, for bright field and dark field
Infinite Plan Apo 50x/0.80 materials sciences objective, WD: 1mm, no cover glass correction, for bright field and dark field
Infinite Plan Apo 100x/0.90 materials sciences objective, WD: 1mm, no cover glass correction, for bright field and dark field
Large Stage 14” x 12”, Range: 356 x 305 mm (Lighting area for transmitted light:356 x 284 mm) It can be used for 300mm wafers, with attached sample bracket. with built-in clutch platform handle, which can realize fast and slow movement of the loading platform, and can quickly locate large-area samples. It is used in conjunction with the platform fine-tuning handle to make it accurate and fast. Locating samples is no longer difficult
Glass plate for slide
Wafer bracket for 2″,3″,4″
Crystal plate brac
SJ8 Height adjustable Abbe long-distance swing-out N.A. 0.65 condenser with numerical aperture engravings. Working distance 10.2 mm
Metallurgical Epi-Illuminator with 6 position rotating cassette, with Brightfield BF1, Dimmed Brightfield BF2 and dark field DF positions. With bank slider, reflected polarizer, reflected analyzer, ME-LBD/GF/YF/FF filter, FL-ND6 filter, FL-ND25 filter. Without illuminator breathing shield
ME-D Dark field part
ME-B Bright field part
ME-PO reflection polarizer
ME-AN reflected analyzer
L-H1003 100W Mercury lamp housing for reflected illumination, used with metallurgical Epi-illuminator
LED illminator for reflected illumination, used with metallurgical Epi-illuminator
Replacement halogen bulb for reflected illumination
Replacement halogen bulb for transmitted illumination
Replacement LED bulb for transmitted illumination
N-PO Transmitted polarizer
Photo port attachment with standard 23,2mm tube
C-mount with 1 magnification for C-mount camera
C-mount with high resolution relay 0.35x objective for 1/3 inch C-mount camera
C-mount with high resolution relay 0.50x objective for 1/2 inch C-mount camera
C-mount with high resolution relay 0,7x objective for 2/3 inch C-mount camera
Universal SLR-adapter with built-in 2x lens for standard 23.2 mm tube. Needs work with T2 adapter
T2 ring for Nikon D SLR-digital camera
T2 ring for Canon EOS SLR-digital camera
Digital camera (please refer ICOE digital camera brochures for more details)